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成長触媒追加供給による樹枝状炭素ナノチューブ構造の形成
https://doi.org/10.14988/pa.2017.0000011139
https://doi.org/10.14988/pa.2017.000001113940f1d092-b172-475f-bfd6-28efcc0e4b48
名前 / ファイル | ライセンス | アクション |
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023048020006.pdf (5.5 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||||
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公開日 | 2007-07-25 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | 成長触媒追加供給による樹枝状炭素ナノチューブ構造の形成 | |||||||||||
タイトル | ||||||||||||
言語 | ja-Kana | |||||||||||
タイトル | セイチョウショクバイ ツイカ キョウキュウ ニヨル ジュシジョウ タンソ ナノチューブ コウゾウ ノ ケイセイ | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Formation of Branched Carbon Nanotube Structure by Additional Supply of Growth Catalysis | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
主題 | カーボンナノチューブ, カーボンナノウォール, プラズマ合成 carbon nanotube, carbon nanowall, plasma material synthesis |
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資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | departmental bulletin paper | |||||||||||
ID登録 | ||||||||||||
ID登録 | 10.14988/pa.2017.0000011139 | |||||||||||
ID登録タイプ | JaLC | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
高橋, 瑛
× 高橋, 瑛× 坂本, 陽平× 粕谷, 俊郎× 和田, 元
WEKO
15436
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著者所属 | ||||||||||||
ja | ||||||||||||
高橋, 瑛 / Graduate School of Engineering, Doshisha University, Kyoto | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
坂本, 陽平 / Graduate School of Engineering, Doshisha University, Kyoto | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
粕谷, 俊郎 / 同志社大学工学部電子工学科教授 | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
和田, 元 / 同志社大学工学部電子工学科教授 | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | プラズマ支援気相成長の前過程として成長触媒を堆積させることにより均一なカーボンナノチューブ(CNT)の合成が可能である。RFマグネトロン放電中に水素希釈したメタンガスを導入し、Si基板にスパッタ蒸着する材料をTi、Fe、Mo、Niと変化させると形成されるカーボンナノ構造が変化する。試験材料の中では、Ni微粒子がもっとも小さな構造寸法を有していた。Si基板上に印加するバイアスを適切に保持するとき、垂直配向成長したCNT層を合成される。この過程に加えて、プラズマ合成中にもNi触媒を追加することで、樹枝上に成長した特異なCNT構造を形成できた。Ni触媒を供給する手順は形成したCNT構造に直接影響を与える。 | |||||||||||
言語 | ja | |||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | Growth catalysis coating prior to a plasma enhanced chemical vapor deposition realizes homogenous carbon nanotube (CNT) layer. Sputter deposition of Ti, Fe, Mo and Ni on Si substrates modifies the deposited carbon nanostructure on the substrates immersed in a H2 diluted CH4 plasma sustained by a radio-frequency magnetron discharge. Among the tested materials, Ni has realized the smallest size nanostructure. Proper bias voltage applied to the Si substrate helped carbon nanotube align perpendicularly to the substrate. Further addition of Ni catalysis during plasma deposition process has formed a peculiar structure of the grown carbon nanotubes having several branches directed to the radial direction. Procedures to supply Ni catalysis directly affected the structure of the formed nanaotubes. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 同志社大学理工学研究報告 en : The Science and Engineering Review of Doshisha University 巻 48, 号 2, p. [106]-111, 発行日 2007-07-31 |
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出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 同志社大学理工学研究所 | |||||||||||
出版者(英) | ||||||||||||
言語 | en | |||||||||||
出版者 | Science and Engineering Research Institute of Doshisha University | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 00368172 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AN00165868 | |||||||||||
権利者情報 | ||||||||||||
権利者名 | 同志社大学理工学研究所 | |||||||||||
言語 | ja | |||||||||||
権利者名 | Science and Engineering Research Institute of Doshisha University | |||||||||||
言語 | en | |||||||||||
関連サイト | ||||||||||||
関連タイプ | isFormatOf | |||||||||||
識別子タイプ | URI | |||||||||||
関連識別子 | https://doors.doshisha.ac.jp/opac/opac_link/bibid/SB00960326/?lang=0 | |||||||||||
言語 | ja | |||||||||||
関連名称 | 掲載刊行物所蔵情報へのリンク / Link to Contents | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
日本十進分類法 | ||||||||||||
主題 | 435.6 |