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Physics and engineering of sheet plasma devices
https://doi.org/10.14988/00001563
https://doi.org/10.14988/0000156374e0d9b7-9c9c-42dc-a974-94afe379b497
名前 / ファイル | ライセンス | アクション |
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要旨/abstaract (246.9 kB)
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zk1044.pdf (6.8 MB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2019-10-16 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Physics and engineering of sheet plasma devices | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | sheet, plasma, diagnostics, ECR | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
ID登録 | ||||||
ID登録 | 10.14988/00001563 | |||||
ID登録タイプ | JaLC | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | シートプラズマ装置の物理と工学 | |||||
言語 | ja | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | シート プラズマ ソウチ ノ ブツリ ト コウガク | |||||
言語 | ja-Kana | |||||
著者 |
Gines, Arnold Rey Burgos
× Gines, Arnold Rey Burgos |
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著者所属 | ||||||
ja | ||||||
理工学研究科 | ||||||
著者所属(英) | ||||||
en | ||||||
Graduate School of Science and Engineering | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | また、この研究は、特定の動作条件で生成されたシートプラズマで、プラズマやシートプラズマの寸法を決定する動作パラメータなどのプラズマ条件を理解し、最適化パラメータと将来の産業用アプリケーションの条件を導き出すことも目的としています。 そのため、この研究は、表面技術アプリケーション用のシートプラズマデバイスの開発と理解に貢献することを試みています。 | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Sheet plasmas have the advantage of producing thin films and functional surfaces by generating localized high-density and temperature gradient regions suitable for specific reactions. A stream of high energy electrons from a plasma cathode efficiently excites and/or ionizes atomic and molecular species which are confined in a linear magnetic field. An electron cyclotron resonance (ECR) sheet plasma device employing a 2.45 GHz microwave source and combination of permanent magnets and field coils was designed and operated. The combined field realized a linear magnetic field that sustained a rectilinear confinement of the plasma. | |||||
言語 | en | |||||
書誌レコードID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BC02544948 | |||||
関連サイト | ||||||
関連タイプ | isFormatOf | |||||
識別子タイプ | URI | |||||
関連識別子 | https://doors.doshisha.ac.jp/opac/opac_link/bibid/BB13128127/?lang=0 | |||||
言語 | ja | |||||
関連名称 | 掲載刊行物所蔵情報へのリンク / Link to Contents | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位名(英) | ||||||
言語 | en | |||||
学位名 | Doctor of Philosophy in Engineering | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 34310 | |||||
言語 | ja | |||||
学位授与機関名 | 同志社大学 | |||||
言語 | en | |||||
学位授与機関名 | Doshisha University | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2019-09-20 | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第1044号 |