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Development of an electron cyclotron resonance plasma source with an internal antenna for carbon film deposition
https://doi.org/10.14988/di.2018.0000000284
https://doi.org/10.14988/di.2018.00000002845935d12b-05fc-412b-9e0b-f8477b9bdc13
名前 / ファイル | ライセンス | アクション |
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要旨/abstaract (284.4 kB)
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zk892.pdf (37.9 MB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2018-05-11 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Development of an electron cyclotron resonance plasma source with an internal antenna for carbon film deposition | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | ECR プラズマ, マイクロ波, アンテナ, カーボンフィルム ECR plasma, microwave, antenna, carbon film |
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資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
ID登録 | ||||||
ID登録 | 10.14988/di.2018.0000000284 | |||||
ID登録タイプ | JaLC | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | 炭素膜蒸着用内部アンテナを用いた電子サイクロトロン共鳴プラズマ源の開発 | |||||
言語 | ja | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | タンソマク ジョウチャクヨウ ナイブ アンテナ オ モチイタ デンシ サイクロトロン キョウメイ プラズマゲン ノ カイハツ | |||||
言語 | ja-Kana | |||||
著者 |
ロメーロ, カミール フェイス
× ロメーロ, カミール フェイス |
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著者所属 | ||||||
ja | ||||||
理工学研究科 | ||||||
著者所属(英) | ||||||
en | ||||||
Graduate School of Science and Engineering | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | An electron cyclotron resonance (ECR) plasma source which couples microwave to the plasma using an internal antenna was developed. The use of internal antenna provides a "windowless" power coupling method that can eliminate the issues of contamination which require frequent source maintenance. Antenna structure, magnetic configuration and plasma parameters were modified for carbon film deposition by chemical sputtering. The ECR source generated low-plasma-potential (10 V), high-plasma-density (10^16 m^-3) discharges at low gas pressures (10^-1 Pa) and low input power (100 W). The antenna realized stable operation for more than 5 h and can be utilized for carbon film deposition. | |||||
言語 | en | |||||
書誌レコードID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BB27354297 | |||||
関連サイト | ||||||
関連タイプ | isFormatOf | |||||
識別子タイプ | URI | |||||
関連識別子 | https://doors.doshisha.ac.jp/opac/opac_link/bibid/BB13071665/?lang=0 | |||||
言語 | ja | |||||
関連名称 | 掲載刊行物所蔵情報へのリンク / Link to Contents | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位名(英) | ||||||
言語 | en | |||||
学位名 | Doctor of Philosophy in Engineering | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 34310 | |||||
言語 | ja | |||||
学位授与機関名 | 同志社大学 | |||||
言語 | en | |||||
学位授与機関名 | Doshisha University | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2018-03-01 | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第892号 |