{"created":"2023-07-27T07:30:40.038848+00:00","id":1404,"links":{},"metadata":{"_buckets":{"deposit":"a767d2c2-1b13-4e24-8e87-d4bc3aa3e72a"},"_deposit":{"created_by":20,"id":"1404","owners":[20],"pid":{"revision_id":0,"type":"depid","value":"1404"},"status":"published"},"_oai":{"id":"oai:doshisha.repo.nii.ac.jp:00001404","sets":["4151:8699:4187:4188","4251:7205:7206:8773:7207"]},"author_link":["3090"],"control_number":"1404","item_1693813220986":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_1694497428290":{"attribute_name":"学位名","attribute_value_mlt":[{"subitem_degreename":"博士(工学)","subitem_degreename_language":"ja"}]},"item_1694497507610":{"attribute_name":"学位名（英）","attribute_value_mlt":[{"subitem_degreename":"Doctor of Philosophy in Engineering","subitem_degreename_language":"en"}]},"item_1694497573527":{"attribute_name":"学位授与機関","attribute_value_mlt":[{"subitem_degreegrantor":[{"subitem_degreegrantor_language":"ja","subitem_degreegrantor_name":"同志社大学"},{"subitem_degreegrantor_language":"en","subitem_degreegrantor_name":"Doshisha University"}],"subitem_degreegrantor_identifier":[{"subitem_degreegrantor_identifier_name":"34310","subitem_degreegrantor_identifier_scheme":"kakenhi"}]}]},"item_3_alternative_title_2":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"炭素膜蒸着用内部アンテナを用いた電子サイクロトロン共鳴プラズマ源の開発","subitem_alternative_title_language":"ja"},{"subitem_alternative_title":"タンソマク ジョウチャクヨウ ナイブ アンテナ オ モチイタ デンシ サイクロトロン キョウメイ プラズマゲン ノ カイハツ","subitem_alternative_title_language":"ja-Kana"}]},"item_3_date_granted_27":{"attribute_name":"学位授与年月日","attribute_value_mlt":[{"subitem_dategranted":"2018-03-01"}]},"item_3_description_12":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"An electron cyclotron resonance (ECR) plasma source which couples microwave to the plasma using an internal antenna was developed. The use of internal antenna provides a \"windowless\" power coupling method that can eliminate the issues of contamination which require frequent source maintenance. Antenna structure, magnetic configuration and plasma parameters were modified for carbon film deposition by chemical sputtering. The ECR source generated low-plasma-potential (10 V), high-plasma-density (10^16 m^-3) discharges at low gas pressures (10^-1 Pa) and low input power (100 W). The antenna realized stable operation for more than 5 h and can be utilized for carbon film deposition.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_3_description_18":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_3_dissertation_number_28":{"attribute_name":"学位授与番号","attribute_value_mlt":[{"subitem_dissertationnumber":"甲第892号"}]},"item_3_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.14988/di.2018.0000000284","subitem_identifier_reg_type":"JaLC"}]},"item_3_relation_16":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"BB27354297","subitem_relation_type_select":"NCID"}}]},"item_3_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_language":"ja","subitem_relation_name_text":"掲載刊行物所蔵情報へのリンク ／ Link to Contents"}],"subitem_relation_type":"isFormatOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doors.doshisha.ac.jp/opac/opac_link/bibid/BB13071665/?lang=0","subitem_relation_type_select":"URI"}}]},"item_3_text_8":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"理工学研究科"}]},"item_3_text_9":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Graduate School of Science and Engineering"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Romero, Camille Faith Pascua","creatorNameLang":"en"},{"creatorName":"ロメーロ, カミール フェイス","creatorNameLang":"ja"}],"familyNames":[{},{}],"givenNames":[{},{}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-05-07"}],"displaytype":"detail","filename":"k892.pdf","filesize":[{"value":"284.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"要旨/abstaract","objectType":"abstract","url":"https://doshisha.repo.nii.ac.jp/record/1404/files/k892.pdf"},"version_id":"50ffd337-9d1a-4d54-8073-fb8b8fdd1e4d"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-11-26"}],"displaytype":"detail","filename":"zk892.pdf","filesize":[{"value":"37.9 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"zk892.pdf","objectType":"fulltext","url":"https://doshisha.repo.nii.ac.jp/record/1404/files/zk892.pdf"},"version_id":"5ecb576a-278c-4966-8078-80d0d509d9c8"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"ECR プラズマ","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロ波","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"アンテナ","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"カーボンフィルム","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"ECR plasma","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"microwave","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"antenna","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"carbon film","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"doctoral thesis","resourceuri":"http://purl.org/coar/resource_type/c_db06"}]},"item_title":"Development of an electron cyclotron resonance plasma source with an internal antenna for carbon film deposition","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Development of an electron cyclotron resonance plasma source with an internal antenna for carbon film deposition","subitem_title_language":"en"}]},"item_type_id":"3","owner":"20","path":["4188","7207"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2018-05-11"},"publish_date":"2018-05-11","publish_status":"0","recid":"1404","relation_version_is_last":true,"title":["Development of an electron cyclotron resonance plasma source with an internal antenna for carbon film deposition"],"weko_creator_id":"20","weko_shared_id":-1},"updated":"2024-03-14T00:38:19.188774+00:00"}