{"created":"2023-07-27T07:48:46.403367+00:00","id":23575,"links":{},"metadata":{"_buckets":{"deposit":"3efb8a4d-9c69-46dc-9dda-a244def151b5"},"_deposit":{"created_by":20,"id":"23575","owners":[20],"pid":{"revision_id":0,"type":"depid","value":"23575"},"status":"published"},"_oai":{"id":"oai:doshisha.repo.nii.ac.jp:00023575","sets":["4251:8138:8139:8140:8159","8:3372:3847:3866"]},"author_link":["21267","21268","15435","2230","15436"],"item_1693811493084":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_1694490770713":{"attribute_name":"権利者情報","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"DA18202107","nameIdentifierScheme":"AID"}],"rightHolderNames":[{"rightHolderLanguage":"ja","rightHolderName":"同志社大学ハリス理化学研究所"},{"rightHolderLanguage":"en","rightHolderName":"Harris Science Research Institute of Doshisha University"}]}]},"item_1_biblio_info_14":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2015-10-31","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"3","bibliographicPageEnd":"212","bibliographicPageStart":"205","bibliographicVolumeNumber":"56","bibliographic_titles":[{"bibliographic_title":"同志社大学ハリス理化学研究報告","bibliographic_titleLang":"ja"},{"bibliographic_title":"The Harris science review of Doshisha University","bibliographic_titleLang":"en"}]}]},"item_1_description_12":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"長方形プラズマ源内で2.45 GHzのマイクロ波と永久磁石による磁場によってArプラズマを生成した。 ラングミュアプローブのアレイによって電子密度と電子温度の2次元空間分布を測定した。永久磁石の配列は電子密度と電子温度の分布に影響し、一方マイクロ波のアンテナと磁石の距離を変えるとマイクロ波の反射が変化した。均一なプラズマ形状になる最適な磁場の構造を議論した。","subitem_description_language":"ja","subitem_description_type":"Abstract"},{"subitem_description":"A power supply network at 2.45 GHz frequency coupled to a field produced by permanent magnets excited an Ar plasma in a rectangular-shape long-slot plasma source. Data measured with an array of Langmuir probe were utilized to construct the two dimensional spatial distribution of electron density and temperature. The arrangement of permanent magnets affected the distribution while the distance of the microwave antenna to the magnets changed the power reflection of the system. Structure of the magnetic field suitable to form homogeneous plasma is discussed.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_1_description_25":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_1_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.14988/pa.2017.0000014275","subitem_identifier_reg_type":"JaLC"}]},"item_1_publisher_15":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"同志社大学ハリス理化学研究所","subitem_publisher_language":"ja"}]},"item_1_publisher_16":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Harris Science Research Institute of Doshisha 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Contents"}],"subitem_relation_type":"isFormatOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doors.doshisha.ac.jp/opac/opac_link/bibid/SB12902196/?lang=0","subitem_relation_type_select":"URI"}}]},"item_1_source_id_17":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"21895937","subitem_source_identifier_type":"PISSN"}]},"item_1_source_id_19":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12716107","subitem_source_identifier_type":"NCID"}]},"item_1_subject_27":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"427.6","subitem_subject_scheme":"NDC"}]},"item_1_text_8":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"鍬田, 雄介 / Graduate School of Science and Engineering, Doshisha University"},{"subitem_text_language":"ja","subitem_text_value":"伊藤, 修 / Graduate School of Science and Engineering, Doshisha University"},{"subitem_text_language":"ja","subitem_text_value":"粕谷, 俊郎 / 同志社大学理工学部電子工学科教授"},{"subitem_text_value":"宮本, 直樹 / Graduate School of Science and Engineering, Doshisha University"},{"subitem_text_language":"ja","subitem_text_value":"和田, 元 / 同志社大学理工学部電気工学科教授"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鍬田, 雄介","creatorNameLang":"ja"},{"creatorName":"クワタ, ユウスケ","creatorNameLang":"ja-Kana"},{"creatorName":"Kuwata, Yusuke","creatorNameLang":"en"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"伊藤, 修","creatorNameLang":"ja"},{"creatorName":"イトウ, シュウ","creatorNameLang":"ja-Kana"},{"creatorName":"Ito, Shu","creatorNameLang":"en"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"粕谷, 俊郎","creatorNameLang":"ja"},{"creatorName":"カスヤ, トシロウ","creatorNameLang":"ja-Kana"},{"creatorName":"Kasuya, Toshiro","creatorNameLang":"en"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"宮本, 直樹","creatorNameLang":"ja"},{"creatorName":"ミヤモト, ナオキ","creatorNameLang":"ja-Kana"},{"creatorName":"Miyamoto, Naoki","creatorNameLang":"en"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"和田, 元","creatorNameLang":"ja"},{"creatorName":"ワダ, モトイ","creatorNameLang":"ja-Kana"},{"creatorName":"Wada, Motoi","creatorNameLang":"en"}],"nameIdentifiers":[{},{},{},{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2015-12-02"}],"displaytype":"detail","filename":"023056030010.pdf","filesize":[{"value":"2.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"023056030010.pdf","url":"https://doshisha.repo.nii.ac.jp/record/23575/files/023056030010.pdf"},"version_id":"187ba7a6-ff5e-46f4-9091-33a45880d46d"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"マイクロ波プラズマ","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"プラズマ源","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"ラングミュアプローブ","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"microwave plasma","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"plasma source","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Langmuir probe","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"長方形マイクロ波プラズマ源内のプラズマ空間分布","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"長方形マイクロ波プラズマ源内のプラズマ空間分布","subitem_title_language":"ja"},{"subitem_title":"チョウホウケイ マイクロハ プラズマゲンナイ ノ プラズマ クウカン ブンプ","subitem_title_language":"ja-Kana"},{"subitem_title":"Spatial plasma distribution in a rectangular-shape microwave plasma source","subitem_title_language":"en"}]},"item_type_id":"1","owner":"20","path":["3866","8159"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2015-12-03"},"publish_date":"2015-12-03","publish_status":"0","recid":"23575","relation_version_is_last":true,"title":["長方形マイクロ波プラズマ源内のプラズマ空間分布"],"weko_creator_id":"20","weko_shared_id":-1},"updated":"2023-11-28T06:22:15.476661+00:00"}