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長方形マイクロ波プラズマ源内のプラズマ空間分布
https://doi.org/10.14988/pa.2017.0000014275
https://doi.org/10.14988/pa.2017.00000142751a7f9e78-994f-40b5-ab93-950266411e6d
名前 / ファイル | ライセンス | アクション |
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023056030010.pdf (2.0 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||||
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公開日 | 2015-12-03 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | 長方形マイクロ波プラズマ源内のプラズマ空間分布 | |||||||||||
タイトル | ||||||||||||
言語 | ja-Kana | |||||||||||
タイトル | チョウホウケイ マイクロハ プラズマゲンナイ ノ プラズマ クウカン ブンプ | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Spatial plasma distribution in a rectangular-shape microwave plasma source | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
主題 | マイクロ波プラズマ, プラズマ源, ラングミュアプローブ microwave plasma, plasma source, Langmuir probe |
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資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | departmental bulletin paper | |||||||||||
ID登録 | ||||||||||||
ID登録 | 10.14988/pa.2017.0000014275 | |||||||||||
ID登録タイプ | JaLC | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
鍬田, 雄介
× 鍬田, 雄介× 伊藤, 修× 粕谷, 俊郎× 宮本, 直樹× 和田, 元
WEKO
15436
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著者所属 | ||||||||||||
ja | ||||||||||||
鍬田, 雄介 / Graduate School of Science and Engineering, Doshisha University | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
伊藤, 修 / Graduate School of Science and Engineering, Doshisha University | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
粕谷, 俊郎 / 同志社大学理工学部電子工学科教授 | ||||||||||||
著者所属 | ||||||||||||
宮本, 直樹 / Graduate School of Science and Engineering, Doshisha University | ||||||||||||
著者所属 | ||||||||||||
ja | ||||||||||||
和田, 元 / 同志社大学理工学部電気工学科教授 | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | 長方形プラズマ源内で2.45 GHzのマイクロ波と永久磁石による磁場によってArプラズマを生成した。 ラングミュアプローブのアレイによって電子密度と電子温度の2次元空間分布を測定した。永久磁石の配列は電子密度と電子温度の分布に影響し、一方マイクロ波のアンテナと磁石の距離を変えるとマイクロ波の反射が変化した。均一なプラズマ形状になる最適な磁場の構造を議論した。 | |||||||||||
言語 | ja | |||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | A power supply network at 2.45 GHz frequency coupled to a field produced by permanent magnets excited an Ar plasma in a rectangular-shape long-slot plasma source. Data measured with an array of Langmuir probe were utilized to construct the two dimensional spatial distribution of electron density and temperature. The arrangement of permanent magnets affected the distribution while the distance of the microwave antenna to the magnets changed the power reflection of the system. Structure of the magnetic field suitable to form homogeneous plasma is discussed. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 同志社大学ハリス理化学研究報告 en : The Harris science review of Doshisha University 巻 56, 号 3, p. 205-212, 発行日 2015-10-31 |
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出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 同志社大学ハリス理化学研究所 | |||||||||||
出版者(英) | ||||||||||||
言語 | en | |||||||||||
出版者 | Harris Science Research Institute of Doshisha University | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 21895937 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA12716107 | |||||||||||
権利者情報 | ||||||||||||
権利者名 | 同志社大学ハリス理化学研究所 | |||||||||||
言語 | ja | |||||||||||
権利者名 | Harris Science Research Institute of Doshisha University | |||||||||||
言語 | en | |||||||||||
関連サイト | ||||||||||||
関連タイプ | isFormatOf | |||||||||||
識別子タイプ | URI | |||||||||||
関連識別子 | https://doors.doshisha.ac.jp/opac/opac_link/bibid/SB12902196/?lang=0 | |||||||||||
言語 | ja | |||||||||||
関連名称 | 掲載刊行物所蔵情報へのリンク / Link to Contents | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
日本十進分類法 | ||||||||||||
主題 | 427.6 |