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アイテム
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Sputtering of liquid metal suspended on an insulating reservoir by radio frequency self-bias
名前 / ファイル | ライセンス | アクション |
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023051020001.pdf (572.0 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||||||||||||||||||||
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公開日 | 2010-08-25 | |||||||||||||||||||||||||||
タイトル | ||||||||||||||||||||||||||||
言語 | en | |||||||||||||||||||||||||||
タイトル | Sputtering of liquid metal suspended on an insulating reservoir by radio frequency self-bias | |||||||||||||||||||||||||||
言語 | ||||||||||||||||||||||||||||
言語 | eng | |||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||
主題 | RF discharges, CCP, ICP, sputtering, liquid metals | |||||||||||||||||||||||||||
資源タイプ | ||||||||||||||||||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||||||||||||
資源タイプ | departmental bulletin paper | |||||||||||||||||||||||||||
ID登録 | ||||||||||||||||||||||||||||
ID登録 | 10.14988/pa.2017.0000012181 | |||||||||||||||||||||||||||
ID登録タイプ | JaLC | |||||||||||||||||||||||||||
アクセス権 | ||||||||||||||||||||||||||||
アクセス権 | open access | |||||||||||||||||||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||||||||||||||||
著者 |
ヴァスケズ, マグダレノ, ジュニア
× ヴァスケズ, マグダレノ, ジュニア
WEKO
2303
× 粕谷, 俊郎× 木村, 恭之
WEKO
17152
× 前野, 修一× 剣持, 貴弘
WEKO
17144
× 和田, 元
WEKO
15436
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著者所属 | ||||||||||||||||||||||||||||
ja | ||||||||||||||||||||||||||||
粕谷, 俊郎 / Graduate School of Engineering, Doshisha University | ||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||
ja | ||||||||||||||||||||||||||||
木村, 恭之 / Graduate School of Engineering, Doshisha University | ||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||
ja | ||||||||||||||||||||||||||||
前野, 修一 / Novelion Systems, Co., Ltd. | ||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||
ja | ||||||||||||||||||||||||||||
剣持, 貴弘 / 同志社大学生命医科学部医工学科准教授 | ||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||
ja | ||||||||||||||||||||||||||||
和田, 元 / Graduate School of Engineering, Doshisha University | ||||||||||||||||||||||||||||
著者所属(英) | ||||||||||||||||||||||||||||
en | ||||||||||||||||||||||||||||
Vasquez, Magdaleno R., Jr. / Graduate School of Engineering, Doshisha University | ||||||||||||||||||||||||||||
抄録 | ||||||||||||||||||||||||||||
内容記述タイプ | Abstract | |||||||||||||||||||||||||||
内容記述 | 可能な限り不純物の混入を抑えるため,ガラス容器とRF電源により構成される,液体金属スパッター装置を設計・製作した.球形ガラス容器底部には,ターゲット近傍に放電を集中させ,電離を促進するために円筒,及びトロイダル形状の磁石を配置し得る電極が取り付けられる.誘導性プラズマ結合系は,RF電力の気体放電に対する良い結合性を示し,低圧力大RF電力で安定にプラズマを維持する.ガラス容器底部に保持した液体ガリウムが周辺プラズマによりスパッターされていることは,四重極質量分析器により確認された.電子温度の評価は局所熱平衡条件をもとに,線スペクトル発光分析より評価した. | |||||||||||||||||||||||||||
言語 | ja | |||||||||||||||||||||||||||
抄録 | ||||||||||||||||||||||||||||
内容記述タイプ | Abstract | |||||||||||||||||||||||||||
内容記述 | A liquid metal sputtering system equipped with a SiO[2] reservoir and a radio frequency (RF) power supply has been designed and built to minimize possible contamination due to sputtering from any materials other than the target material. An electrode fitted with cylindrical and toroidal magnets was designed and mounted at the bottom of the spherical glass chamber in order to confine the discharge near the target and enhance the ionization efficiency. The inductively coupled plasma configuration exhibited good coupling of the RF power to the gas discharge sustained at low gas pressures and high RF powers. Liquid gallium suspended upon the chamber bottom was confirmed sputtered by the surrounding plasma by a quadrupole mass analyzer. Electron temperature (T[e]) was estimated from the optical emission lines under the local thermodynamic equilibrium (LTE) approximation. | |||||||||||||||||||||||||||
言語 | en | |||||||||||||||||||||||||||
内容記述 | ||||||||||||||||||||||||||||
内容記述タイプ | Other | |||||||||||||||||||||||||||
内容記述 | 抄録に表記の[2]と[e]は下つき文字 | |||||||||||||||||||||||||||
言語 | ja | |||||||||||||||||||||||||||
書誌情報 |
ja : 同志社大学理工学研究報告 en : The Science and Engineering Review of Doshisha University 巻 51, 号 2, p. 1-10, 発行日 2010-07-31 |
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出版者 | ||||||||||||||||||||||||||||
言語 | ja | |||||||||||||||||||||||||||
出版者 | 同志社大学理工学研究所 | |||||||||||||||||||||||||||
出版者(英) | ||||||||||||||||||||||||||||
言語 | en | |||||||||||||||||||||||||||
出版者 | Science and Engineering Research Institute of Doshisha University | |||||||||||||||||||||||||||
ISSN | ||||||||||||||||||||||||||||
収録物識別子タイプ | PISSN | |||||||||||||||||||||||||||
収録物識別子 | 00368172 | |||||||||||||||||||||||||||
書誌レコードID | ||||||||||||||||||||||||||||
収録物識別子タイプ | NCID | |||||||||||||||||||||||||||
収録物識別子 | AN00165868 | |||||||||||||||||||||||||||
権利者情報 | ||||||||||||||||||||||||||||
権利者名 | 同志社大学理工学研究所 | |||||||||||||||||||||||||||
言語 | ja | |||||||||||||||||||||||||||
権利者名 | Science and Engineering Research Institute of Doshisha University | |||||||||||||||||||||||||||
言語 | en | |||||||||||||||||||||||||||
関連サイト | ||||||||||||||||||||||||||||
関連タイプ | isFormatOf | |||||||||||||||||||||||||||
識別子タイプ | URI | |||||||||||||||||||||||||||
関連識別子 | https://doors.doshisha.ac.jp/opac/opac_link/bibid/SB00960326/?lang=0 | |||||||||||||||||||||||||||
言語 | ja | |||||||||||||||||||||||||||
関連名称 | 掲載刊行物所蔵情報へのリンク / Link to Contents | |||||||||||||||||||||||||||
フォーマット | ||||||||||||||||||||||||||||
内容記述タイプ | Other | |||||||||||||||||||||||||||
内容記述 | application/pdf | |||||||||||||||||||||||||||
出版タイプ | ||||||||||||||||||||||||||||
出版タイプ | VoR | |||||||||||||||||||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||||||
日本十進分類法 | ||||||||||||||||||||||||||||
主題 | 549.1 |